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SMC Solenoid Valves（Specifications：Cleanroom）

14 items

: 30; 45; 60

Days to Ship	All Same day 2 Day(s) or Less 4 Day(s) or Less 5 Day(s) or Less 6 Day(s) or Less 7 Day(s) or Less 8 Day(s) or Less 9 Day(s) or Less 10 Day(s) or Less 11 Day(s) or Less

4 / 5 Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ3000 Series

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
5-Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ5000 Series

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
3-port solenoid valve, pilot type, elastic seal, clean series 10-SYJ500 series

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
3-port solenoid valve, pilot type, elastic seal, clean series 10-SYJ700 series

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ1000

SMC

[10-Series, Clean Series]
Suitable for clean environment
Prevents dust generation in the cleanroom

Days to Ship: Quote
5-Port Solenoid Valve, Base Mounted, Clean, 10-SY3000/5000/7000/9000

SMC

[10-Series, Clean Series]
· Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000, Type 60

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
5 Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ7000 Series

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
5-Port Solenoid Valve, Clean Series 10-SV1000/2000/3000/4000 Series

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

[Please click here for the catalog]
P.184 EX500 Distributed serial wiring support
P.265 Single unit / sub plate type [IP67 compliant]

Days to Ship: 46 Day(s) or more
3-Port Solenoid Valve, Direct-Acting, Elastic Body Seal, Clean Series 10-SY100 Series

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
3-Port Solenoid Valve, Direct Acting Type, Elastic Material Seal, Clean, Large Flow Rate Type

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ2000

SMC

[10-Series, Clean Series]
Suitable for clean environment
Prevents dust generation in the cleanroom

Days to Ship: Quote
3-port solenoid valve, Pilot type elastic seal, clean series 10-SYJ300 series

SMC

[10-Series, Clean Series]
・ Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more
5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000/9000

SMC

[10-Series, Clean Series]
· Suitable for clean environment
· It prevents dust generation in the cleanroom

Days to Ship: 46 Day(s) or more

Days to Ship:	46 Day(s) or more

Days to Ship:	46 Day(s) or more

Days to Ship:	46 Day(s) or more

Days to Ship:	46 Day(s) or more

Days to Ship:	Quote

Days to Ship:	46 Day(s) or more

Days to Ship:	46 Day(s) or more

Days to Ship:	46 Day(s) or more

Days to Ship:	46 Day(s) or more

Days to Ship:	46 Day(s) or more

Days to Ship:	46 Day(s) or more

Days to Ship:	Quote

Days to Ship:	46 Day(s) or more

Days to Ship:	46 Day(s) or more


Brand
Product Series
Days to Ship
Number of Ports
Application
Switching Type
Voltage
Number of Solenoids
Mounting Orientation
Pipe Port Type
Specifications
Status at Power Off
Plumbing Thread Nominal
Plumbing
Applicable Cylinder Dia.(Ø)
Type
Driving Type
Connecting Tube Diameter
Pressure Rating(MPa)
Seal Type
CV Value
Pilot Air Supply


Brand	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC
Product Series	4 / 5 Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ3000 Series	5-Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ5000 Series	3-port solenoid valve, pilot type, elastic seal, clean series 10-SYJ500 series	3-port solenoid valve, pilot type, elastic seal, clean series 10-SYJ700 series	5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ1000	5-Port Solenoid Valve, Base Mounted, Clean, 10-SY3000/5000/7000/9000	5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000, Type 60	5 Port Solenoid Valve, Elastic Seal, Clean Series 10-SYJ7000 Series	5-Port Solenoid Valve, Clean Series 10-SV1000/2000/3000/4000 Series	3-Port Solenoid Valve, Direct-Acting, Elastic Body Seal, Clean Series 10-SY100 Series	3-Port Solenoid Valve, Direct Acting Type, Elastic Material Seal, Clean, Large Flow Rate Type	5-Port Solenoid Valve, Base Mounted, Clean, 10-VQ2000	3-port solenoid valve, Pilot type elastic seal, clean series 10-SYJ300 series	5-Port Solenoid Valve, Body Ported, Clean, 10-SY3000/5000/7000/9000
Days to Ship	46 Day(s) or more	46 Day(s) or more	46 Day(s) or more	46 Day(s) or more	Quote	46 Day(s) or more	46 Day(s) or more	46 Day(s) or more	46 Day(s) or more	46 Day(s) or more	46 Day(s) or more	Quote	46 Day(s) or more	46 Day(s) or more
Number of Ports	4-Port Valve / 5-Port Valve	5-Port Valve	3-Port Valve	3-Port Valve	5-Port Valve	5-Port Valve	5-Port Valve	5-Port Valve	5-Port Valve / Dual 3-Port Valve	3-Port Valve	3-Port Valve	5-Port Valve	3-Port Valve	5-Port Valve
Application	Single Use / Unit for Manifold Mounting	Single Use / Unit for Manifold Mounting	Single Use / Unit for Manifold Mounting	Single Use / Unit for Manifold Mounting	Unit for Manifold Mounting	Single Use / Unit for Manifold Mounting	Unit for Manifold Mounting	Single Use / Unit for Manifold Mounting	Single Use / Unit for Manifold Mounting	Single Use / Unit for Manifold Mounting	Single Use / Unit for Manifold Mounting	Unit for Manifold Mounting	Single Use / Unit for Manifold Mounting	Single Use
Switching Type	2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center	2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center	2-Position Normally Open / 2-Position Normally Closed	2-Position Normally Open / 2-Position Normally Closed	2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center	2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center	2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center	2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center	2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center / Others	2-Position Normally Open / 2-Position Normally Closed	2-Position Normally Open / 2-Position Normally Closed	2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center	2-Position Normally Open / 2-Position Normally Closed	2-Position Exhaust / 3-Position Closed Center / 3-Position Exhaust Center / 3-Position Pressure Center
Voltage	DC12V / DC24V / AC100V / AC110V / DC5V	DC12V / DC24V / AC100V / AC110V / AC200V / AC220V / DC5V	DC12V / DC24V / AC100V / AC110V / AC200V / AC220V / DC5V	DC12V / DC24V / AC100V / AC200V	DC24V	DC24V / AC100V / AC110V / AC200V / AC220V / DC5V	DC24V / AC100V	DC24V / AC100V / AC110V / AC200V / AC220V	DC24V	DC12V / DC24V / AC100V / AC110V / AC200V / AC220V / DC5V	DC12V / DC24V / DC5V	DC24V	DC12V / DC24V / AC100V / AC110V / AC200V / AC220V / DC5V	DC12V / DC24V / AC100V / AC110V / AC200V / AC220V / DC5V
Number of Solenoids	Single / Double	Single / Double	Single	Single	Single / Double	Single / Double	Single / Double	Single / Double	Single / Double	Single	Single	Single / Double	Single	Single / Double
Mounting Orientation	Direct / Manifold Base	Direct / Manifold Base	Direct / Manifold Base	Direct / Manifold Base	Manifold Base	Direct / Manifold Base	Manifold Base	Direct / Manifold Base	Direct / Manifold Base	Direct / Manifold Base	Direct / Manifold Base	Manifold Base	Direct / Manifold Base	Direct
Pipe Port Type	M	M / Rc (R) / NPT / NPTF / One-Touch Plumbing	M / Rc (R) / G	Rc (R) / NPT / NPTF / G	-	Rc (R) / G	M / Rc (R) / One-Touch Plumbing	Rc (R) / NPT / NPTF / G / One-Touch Plumbing	Rc (R) / NPT / NPTF / G	M	M	-	M	M / Rc (R) / NPT / G / One-Touch Plumbing
Specifications	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom	Cleanroom
Status at Power Off	Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)	Self-Retaining / Self-Recovery (Spring Return)	Self-Recovery (Spring Return)	Self-Recovery (Spring Return)	Self-Retaining / Self-Recovery (Spring Return)	Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)	Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)	Self-Retaining / Self-Recovery (Spring Return)	Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)	Self-Recovery (Spring Return)	Self-Recovery (Spring Return)	Self-Retaining / Self-Recovery (Spring Return)	Self-Recovery (Pressure Differential Return)	Self-Retaining / Self-Recovery (Spring Return) / Self-Recovery (Pressure Differential Return)
Plumbing Thread Nominal	M3 ～ M5	1/8 ～ M5	1/8 ～ M5	1/4 ～ 1/8	-	1/2 ～ 3/8	1/4 ～ M5	1/4 ～ 1/8	1/2 ～ 3/8	M3	M3	-	M3 ～ M5	1/4 ～ M5
Plumbing	Direct Plumbing / Sub-Base Plumbing	Direct Plumbing / Sub-Base Plumbing	Direct Plumbing / Sub-Base Plumbing	Direct Plumbing / Sub-Base Plumbing	Sub-Base Plumbing	Sub-Base Plumbing	Direct Plumbing	Direct Plumbing / Sub-Base Plumbing	Sub-Base Plumbing	Direct Plumbing / Sub-Base Plumbing	Direct Plumbing / Sub-Base Plumbing	Sub-Base Plumbing	Direct Plumbing / Sub-Base Plumbing	Direct Plumbing
Applicable Cylinder Dia.(Ø)	40 or less	-	-	-	80 or Less	63 or less ～ 125 or less	-	100 or Less	-	-	-	100 or Less	-	63 or less ～ 160 or Less
Type	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves	Solenoid Valves
Driving Type	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool	Pilot Type Spool
Connecting Tube Diameter	-	Ø4 / Ø6	-	-	-	-	Ø4 / Ø6 / Ø8 / Ø10	Ø6 / Ø8	-	-	-	-	-	Ø4 / Ø6 / Ø8 / Ø10 / Ø12 / Ø1/4 / Ø3/8
Pressure Rating(MPa)	0.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7	0.15 to 0.7 / 0.1 to 0.7	0.15 to 0.7	0.15 to 0.7	0.1 to 0.7 / 0.15 to 0.70 / 0.2 to 0.7 / 0.1 to 1.0	0.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7 / -0.1 to 0.7	0.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7	0.15 to 0.7 / 0.1 to 0.7	0.25 to 0.7 / 0.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7	0 to 0.7	0 to 0.7	0.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7 / 0.1 to 1.0	0.15 to 0.7	0.15 to 0.7 / 0.1 to 0.7 / 0.2 to 0.7
Seal Type	Soft Seal	Soft Seal	Soft Seal	Soft Seal	Standard / Soft Seal	Soft Seal	Soft Seal	Soft Seal	Soft Seal	Soft Seal	Soft Seal	Standard / Soft Seal	Soft Seal	Soft Seal
CV Value	0.1 ～ 0.12	-	0.14 ～ 0.33	0.7 ～ 0.77	0.16 ～ 0.21	0.18 ～ 3.3	-	0.34 ～ 0.78	0.24 ～ 2.2	0.008	0.012	0.46 ～ 0.55	0.086 ～ 0.089	0.13 ～ 2.2
Pilot Air Supply	Internal	Internal	Internal	Internal	Internal	Internal / External	Internal	Internal	Internal / External	Internal	Internal	Internal	Internal	Internal

Configure

Specification/Dimensions

Number of Ports
- 2-Port Valve
- 3-Port Valve
- 4-Port Valve
- 5-Port Valve
- Dual 3-Port Valve
Images

Clear

Application
- Single Use
- Manifolds
- Unit for Manifold Mounting
Clear

Switching Type
- 2-Position Normally Open
- 2-Position Normally Closed
- 2-Position Exhaust
- 2-Position Pressure
- 3-Position Closed Center
- 3-Position Exhaust Center
- 3-Position Pressure Center
- Others
Images

Clear

Voltage
- DC12V
- DC24V
- DC100V
- AC100V
- AC110V
- AC200V
- AC220V
- DC5V
- DC6V
- DC48V
- AC24V
- DC3V
- AC240V
- 110/120 V AC
- AC48
- DC110V
- AC120V
Clear

Number of Solenoids
- Single
- Double
Clear

Mounting Orientation
- Direct
- Manifold Base
- Rail
Images

Clear

Pipe Port Type
- M
- Rc (R)
- NPT
- NPTF
- G
- One-Touch Plumbing
- Barbed Couplers
- Rp
- Others
The above value is for connection securely established between P Port and A Port when positive pressure is applied. For details, see the technical data provided by the relevant manufacturer.

Clear

Specifications
- Standard
- High Frequency
- Low Vacuum Compatible
- Explosion Proof
- Drip-Proof
- Ozone Compatible
- Lubrication Free
- No Copper, fluoropolymer Type Material
- Low Current
- Cleanroom
Clear

Status at Power Off
- Self-Retaining
- Self-Recovery (Spring Return)
- Self-Recovery (Pressure Differential Return)
Clear

Plumbing Thread Nominal
1

1 1/2

1 1/4

1/2

1/4

1/8

2

M3

3/4

3/8

M5
The above value is for connection securely established between P Port and A Port when positive pressure is applied. For details, see the technical data provided by the relevant manufacturer.
Clear

Plumbing
- Direct Plumbing
- Sub-Base Plumbing
Clear

Applicable Cylinder Dia.(Ø)
6 to 16

6 to 25

8

16 or less

16 to 20

16 to 40

20 or Less

20 to 25

20 to 40

20 to 50

20 to 100

22

28

32 or less

32 to 80

40 or less

40 to 80

40 to 140

40 to 160

40 to 180

40 to 200

40 to 300

50

50 or Less

50 to 200

50 to 300

63 or less

63 to 100

80

80 or Less

80 or Less_

80 to 160

80 to 300

100

100 or Less

125

125 or less

125 to 160

125 to 300

140 or less

140or More

140 to 200

160 or Less

180

180 to 250

200 or less

250 or Less
Clear

Type
- Solenoid Valves
- Master Valve
- Base Only
- Related Components
Details

Clear

Driving Type
- Linear Motion Poppet
- Linear Motion Spool
- Pilot Type Poppet
- Pilot Type Spool
Clear

Connecting Tube Diameter
- Ø3.2
- Ø4
- Ø6
- Ø8
- Ø10
- Ø12
- Ø1/8
- Ø5/32
- Ø1/4
- Ø5/16
- Ø3/8
- ø2
- Ø4/Ø6
- Ø6/Ø8
It shows the pipe port type for A and B port.

Clear

Pressure Rating(MPa)
- 0.15 to 0.7
- 0 to 0.7
- 0 to 0.8
- 0 to 1.0
- 0 to 1.5
- 0.05 to 1.0
- 0.1 to 0.7
- 0.15 to 0.70
- 0.15 to 0.8
- 0.2 to 0.7
- 0.2 to 0.8
- 0.3 to 0.7
- 0.7
- 1.0
- -0.1 to 0.7
- -0.1 to 1
- 0 to 0.5
- 0.15 to 1
- 0.2 to 1
- 0.3 to 1.0
- -0.1 to 0.8
- -0.1 to 0.2
- 0~0.6
- 0 to 0.9
- -0.1 to 0.1
- 0.5
- 0.1 ~ 0.9
- 02 to 0.9
- 0.01 to 0.5
- -0.1 to 0.9
- 0.25 to 0.7
- 0.1 to 0.6
- 0.1 to 1.0
- 0.15 to 0.9
- 0.5 to 5.0
- 0.01 to 0.6
- -0.1 to 0.6
- 0 to 1.4
Clear

Seal Type
- Standard
- Soft Seal
- Poppet Seal
Clear

CV Value
0.006

0.008

0.009

0.01

0.011

0.012

0.014

0.016

0.017

0.022

0.023

0.025

0.03

0.033

0.035

0.036

0.04

0.042

0.05

0.06

0.07

0.072

0.08

0.082

0.086

0.087

0.089

0.09

0.10

0.103

0.11

0.12

0.13

0.14

0.149

0.15

0.16

0.17

0.171

0.18

0.19

0.2

0.203

0.21

0.22

0.23

0.233

0.24

0.241

0.25

0.26

0.27

0.28

0.29

0.30

0.31

0.32

0.325

0.33

0.34

0.35

0.36

0.37

0.38

0.39

0.4

0.41

0.42

0.44

0.45

0.46

0.47

0.48

0.49

0.5

0.51

0.52

0.53

0.54

0.55

0.56

0.57

0.58

0.59

0.60

0.61

0.62

0.63

0.64

0.65

0.66

0.67

0.68

0.69

0.7

0.71

0.72

0.732

0.74

0.75

0.76

0.77

0.78

0.79

0.8

0.81

0.813

0.82

0.83

0.84

0.85

0.86

0.87

0.88

0.89

0.9

0.91

0.92

0.93

0.94

0.96

0.97

0.99

1

1.08

1.1

1.11

1.14

1.2

1.25

1.3

1.39

1.4

1.46

1.5

1.518

1.599

1.6

1.67

1.68

1.7

1.707

1.73

1.76

1.789

1.8

1.9

2

2.1

2.2

2.3

2.4

2.5

2.6

2.7

2.71

2.78

2.8

2.9

2.981

3.0

3.2

3.252

3.3

3.33

3.4

3.5

3.523

3.6

3.7

3.8

3.9

4

4.1

4.2

4.4

4.5

4.6

4.7

4.8

5.1

5.2

5.3

5.5

5.7

5.8

6.2

6.4

6.8

7

7.2

7.6

8.7

8.9

9.1

9.2

9.3

9.4

9.6

9.7

9.8

10

11

11.4

12.5

15.2

16.8

17

18

30.9

33

35.2

37

45
Clear

Pilot Air Supply
- Internal
- External
Clear

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SMC Solenoid Valves（Specifications：Cleanroom）

Configure

Specification/Dimensions

Number of Ports

Application

Switching Type

Voltage

Number of Solenoids

Mounting Orientation

Pipe Port Type

Specifications

Status at Power Off

Plumbing Thread Nominal

Plumbing

Applicable Cylinder Dia.(Ø)

Type

Driving Type

Connecting Tube Diameter

Pressure Rating(MPa)

Seal Type

CV Value

Pilot Air Supply

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