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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series (Part Numbers)

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
Refer to the manufacturer's catalog for specification and material details.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

■Please refer to the following for the details of the auto switch D-F7NJ.

■Please refer to the following for the details of the auto switch D-M9NJ.

: 30; 60; 90

Part Number
XLF-63A-2
XLF-63A-2M9BA
XLF-63A-2M9NA
XLF-63D-2
XLF-63D-2M9//
XLF-63D-2M9BA
XLF-63D-2M9BLA
XLF-63D-2M9NA
XLF-63DA-2M9//
XLF-63DA-2M9BA
XLF-63DA-2M9NA
XLF-63DG-2
XLF-63DG-2A93LA
XLF-63DG-2M9//
XLF-63DG-2M9BZA
XLF-63DG-2M9BZB
XLF-63DG-2M9BZC
XLF-63DG-2M9NA
XLF-63G-2M9BA-XN1A
XLF-63H0-2
XLF-63MH5-2
XLF-80-2
XLF-80-2-XR3A
XLF-80-2-XT1A
XLF-80-2A93A
XLF-80-2M9BA
XLF-80-2M9BA-XP1A
XLF-80-2M9BB
XLF-80-2M9BC
XLF-80-2M9BZA
XLF-80A-2M9//
XLF-80A-2M9BLA
XLF-80A-2M9NLB
XLF-80D-2
XLF-80D-2A93A
XLF-80D-2M9//
XLF-80D-2M9BLA
XLF-80DF-2
XLF-80DG-2M9BA-XN1A
XLF-80DG-2M9BLA
XLF-80DH0-2
XLF-80DLH0-2
XLF-80G-2
XLF-80G-2M9//
XLF-80G-2M9BA-XN1A
XLF-80G-2M9NB
XLF-80G-2M9NMA
XLF-80GH4-2
XLF-80H0-2

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Indicator	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Body Surface Treatment	Seal Change Location	Length of Lead Wire for Switch (m)	Heater Yes/No
-	1 Piece(s)	Quote	KF	63	With indicator	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	63	With indicator	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	63	With indicator	Flange side	5 to 60	M9N	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	K	63	No indicator	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	63	No indicator	Flange side	5 to 60	No auto-switch (with magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	63	No indicator	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	K	63	No indicator	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	K	63	No indicator	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	K	63	With indicator	Flange side	5 to 60	No auto-switch (with magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	63	With indicator	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	K	63	With indicator	Flange side	5 to 60	M9N	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	K	63	With indicator	Flange surface, back	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	63	With indicator	Flange surface, back	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
SGD 1,607.08	1 Piece(s)	Quote	K	63	With indicator	Flange surface, back	5 to 60	No auto-switch (with magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	63	With indicator	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	K	63	With indicator	Flange surface, back	5 to 60	D-M9B solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	K	63	With indicator	Flange surface, back	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	K	63	With indicator	Flange surface, back	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	63	With indicator	Flange surface, back	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	EPDM (Formula No.: 2101-80)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	KF	63	No indicator	Flange side	5 to 150	No auto-switch (no magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	63	No indicator	Flange surface, right	5 to 150	No auto-switch (no magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	With heater for 120℃
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	Chemraz (Compound No.: SSE38)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	-	None
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	FKM for Plasma 3310-75	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	-	None
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	Barrel Perfluoro (Compound No.: 70 W)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 60	M9B	With 1 pc. (Detection position: Valve opening)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 60	M9B	With 1 pc. (Detection position: Valve closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	KF	80	With indicator	Flange side	5 to 60	No auto-switch (with magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	With indicator	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	80	With indicator	Flange side	5 to 60	M9N	With 1 pc. (Detection position: Valve opening)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	K	80	No indicator	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	80	No indicator	Flange side	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	K	80	No indicator	Flange side	5 to 60	No auto-switch (with magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	80	No indicator	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	K	80	With indicator	Flange surface, left	5 to 60	No auto-switch (no magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	80	With indicator	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × ^-8, External: 1.3 × ^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	K	80	With indicator	Flange surface, back	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	K	80	No indicator	Flange side	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	K	80	No indicator	Flange surface, back	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	With indicator	Flange surface, back	5 to 60	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	With indicator	Flange surface, back	5 to 60	No auto-switch (with magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	80	With indicator	Flange surface, back	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × ^-8, External: 1.3 × ^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	KF	80	With indicator	Flange surface, back	5 to 60	D-M9N solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	80	With indicator	Flange surface, back	5 to 60	M9N	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	1	None
-	1 Piece(s)	Quote	KF	80	With indicator	Flange surface, back	5 to 150	No auto-switch (no magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	With heater for 100°C
-	1 Piece(s)	Quote	KF	80	No indicator	Flange side	5 to 150	No auto-switch (no magnet)	No switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None

Basic Information

Type	Pilot Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Elastic Seal

Configure

229 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Flange Type
- KF
- K
Clear
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
Clear
Indicator
- No indicator
- With indicator
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
F7NJ

D-M9B solid-state auto switch

D-M9N solid-state auto switch

D-M9NJL

D-M9P solid-state auto switch

D-M9PJL

M9B

M9N

M9NJ

M9P

M9PJ

A90

D-A90 reed auto switch (Flange size 16 not supported)

A93

D-A93 reed auto switch (Flange size 16 not supported)

No auto-switch (no magnet)

No auto-switch (with magnet)
Clear
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
- No switch
Clear
Seal material
Chemraz (Compound No.: SSE38)

Barrel Perfluoro (Compound No.: 70 W)

Chemraz (Compound No.: SS630)

VMQ (Formula No.: 1232-70)

FKM 1349-80

FKM (Formula No.: 1349-80)

EPDM 2101-80

EPDM (Formula No.: 2101-80)

FKM for Plasma 3310-75

Kalrez 4079

Kalrez (Compound No.: 4079)
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × ^-10, External: 1.3 × ^-10
- Internal: 1.3 × ^-8, External: 1.3 × ^-10
- Internal: 1.3 × ^-8, External: 1.3 × ^-8
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-8
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-8
Clear
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
Clear
Seal Change Location
Valve seal 1 / valve seal 2

Valve seal 1 / valve seal 2 / external seal

External seal

None
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
Clear
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
Clear
type
- XLF
- XLF-16
- XLF-25
- XLF-40
- XLF-50
- XLF-63
- XLF-80
Clear
CAD
- 2D
- 3D
Clear

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The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series (Part Numbers)

(i)Caution

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Indicator

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m³/s)

Body Surface Treatment

Seal Change Location

Length of Lead Wire for Switch(m)

Heater Yes/No

type

CAD

Specify Alterations

Tech Support

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MISUMI Contact 9:00 am – 6:00 pm (Mon – Fri), 9:00 am – 3 pm (Sat)

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Brands

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My Favorites

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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series (Part Numbers)

(i)Caution

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Indicator

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Body Surface Treatment

Seal Change Location

Length of Lead Wire for Switch(m)

Heater Yes/No

type

CAD

Specify Alterations

Tech Support

Payment Method more

About MISUMI

About this Website

Useful Tools

Customer Service

Social Media

MISUMI Contact 9:00 am – 6:00 pm (Mon – Fri), 9:00 am – 3 pm (Sat)

Amount of leakage(Pa·m³/s)