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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series (Part Numbers)

Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

■Please refer to the following for the details of the auto switch D-F7NJ.

■Please refer to the following for the details of the auto switch D-M9NJ.

Part Number
XLC-63D-2M9//
XLC-63D-2M9BB
XLC-63DKH0-2
XLC-63H0-2
XLC-63K-2
XLC-63K-2M9//
XLC-63L-2M9BB
XLC-63L-2M9BZA
XLC-80-2
XLC-80-2-XA
XLC-80-2-XAP1B
XLC-80-2-XP1A
XLC-80-2-XQ1A
XLC-80-2A93LA
XLC-80-2M9//
XLC-80-2M9BA
XLC-80-2M9BA-XA
XLC-80-2M9BLA
XLC-80-2M9BLA-XN1A
XLC-80-2M9BLC
XLC-80-2M9BLC-XAP1A
XLC-80-2M9BZA
XLC-80-2M9NA
XLC-80-2M9NLA
XLC-80-2M9NZC
XLC-80DL-2M9NA
XLC-80H0-2
XLC-80H4-2
XLC-80H5-2
XLC-80L-2M9//
XLC-80L-2M9BA
XLC-80L-2M9BA-XQ1B
XLC-80L-2M9BLA
XLC-80L-2M9NA
XLC-80L-2M9NLC
XLC-80L-2M9NMA
XLC-80LH0-2-XQ1A
XLC-80M-2A90LA-XN1A
XLC-80M-2A90LA-XN1B
XLC-80M-2A90LA-XN1C
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

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1 Piece(s) Quote K63160L/SFlange side5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote K63160L/SFlange side5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote K63160L/SFlange surface, left5 to 150No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF63160L/SFlange side5 to 150℃No auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF63160L/SFlange surface, left5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF63160L/SFlange surface, left5 to 60No auto-switch (with magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF63160L/SFlange surface, back5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF63160L/SFlange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationNone-None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60No auto-switch (no magnet)No switchBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2-None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60°CNo auto-switch (no magnet)No auto switchBarrel Perfluoro (Compound No.: 70 W)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60°CNo auto-switch (no magnet)No auto switchKalrez (Compound No.: 4079)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60D-A93 (L) reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60No auto-switch (with magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF80200L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationNone0.5None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60°CM9BWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal3None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60D-M9B (L) solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60D-M9B (L) solid-state auto switch1 pc. valve closedBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external seal3None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60°CM9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60D-M9N (L) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80200L/SFlange side5 to 60M9NWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote K80200L/SFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80200L/SFlange side5 to 150No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF80200L/SFlange side5 to 150No auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone-With heater for 100°C

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1 Piece(s) Quote KF80200L/SFlange side5 to 150No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-With heater for 120℃

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1 Piece(s) Quote KF80200L/SFlange surface, back5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF80200L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80200L/SFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 20.5None

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1 Piece(s) Quote KF80200L/SFlange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80200L/SFlange surface, back5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80200L/SFlange surface, back5 to 60M9NWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80200L/SFlange surface, back5 to 60°CM9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone1None

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1 Piece(s) Quote KF80200L/SFlange surface, back5 to 150℃No auto-switch (no magnet)No auto switchKalrez (Compound No.: 4079)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

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1 Piece(s) Quote KF80200L/SFlange surface, right5 to 60A90With 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal3None

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1 Piece(s) Quote KF80200L/SFlange surface, right5 to 60A90With 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 23None

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1 Piece(s) Quote KF80200L/SFlange surface, right5 to 60A90With 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialExternal seal3None

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Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

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