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Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

■Please refer to the following for the details of the auto switch D-F7NJ.

■Please refer to the following for the details of the auto switch D-M9NJ.

Part Number
XLC-16-2
XLC-16-2-XA
XLC-16-2M9//
XLC-16-2M9BA
XLC-16-2M9BC
XLC-16-2M9BLA
XLC-16-2M9BLA-XN1A
XLC-16-2M9BZA
XLC-16-2M9NA
XLC-16-2M9NC
XLC-16-2M9PLB
XLC-16K-2
XLC-16K-2-XA
XLC-16L-2
XLC-16L-2-XA
XLC-16L-2M9//
XLC-16L-2M9BLA
XLC-16L-2M9NA
XLC-16L-2M9PA
XLC-16LH0-2
XLC-25-2
XLC-25-2-XA
XLC-25-2A90LA-XQ1B
XLC-25-2A93A
XLC-25-2A93A-XN1A
XLC-25-2A93B
XLC-25-2A93LA
XLC-25-2A93LA-XAN1A
XLC-25-2M9//
XLC-25-2M9//-XN1C
XLC-25-2M9BA
XLC-25-2M9BC
XLC-25-2M9BLA
XLC-25-2M9BLA-XN1A
XLC-25-2M9BLA-XQ1B
XLC-25-2M9BLC-XAP1A
XLC-25-2M9BZA
XLC-25-2M9NA
XLC-25-2M9NC
XLC-25-2M9NLA
XLC-25-2M9NLC
XLC-25-2M9NMA
XLC-25-2M9PZA-XA
XLC-25H0-2
XLC-25H0-2M9J/
XLC-25H0-2M9NJLA
XLC-25H0-2M9NJZA
XLC-25H5-2
XLC-25H5-2-XS1A
XLC-25H5-2M9NJLA
XLC-25H5-2M9NJLA-XS1A
XLC-25K-2
XLC-25K-2A93A
XLC-25K-2A93A-XP1B
XLC-25K-2M9//
XLC-25K-2M9BA
XLC-25K-2M9BLA
XLC-25L-2
XLC-25L-2A90A
XLC-25L-2A93A
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Sonic Speed Conductance Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

SGD 642.37

1 Piece(s) Quote KF165L/SFlange side5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF165L/SFlange side5 to 60°CNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, internal: anodic oxidationNone-None

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1 Piece(s) Quote KF165L/SFlange side5 to 60No auto-switch (with magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9B (L) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF165L/SFlange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal3None

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1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9B (Z) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone5None

SGD 729.05

1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF165L/SFlange side5 to 60D-M9P (L) solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF165L/SFlange surface, left5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF165L/SFlange surface, left5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationNone-None

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1 Piece(s) Quote KF165L/SFlange surface, back5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF165L/SFlange surface, back5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationNone-None

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1 Piece(s) Quote KF165L/SFlange surface, back5 to 60No auto-switch (with magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF165L/SFlange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF165L/SFlange surface, back5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF165L/SFlange surface, back5 to 60°CM9PWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF165L/SFlange surface, back5 to 150No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60°CNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, internal: anodic oxidationNone-None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-A90 (L) reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 23None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60°CA93With 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)1 pc. valve openFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external seal3None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60No auto-switch (with magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60No auto-switch (with magnet)No auto switchEPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialExternal seal-None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9B (L) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal3None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9B (L) solid-state auto switch2 pcs. valve open/closedKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 23None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9B (L) solid-state auto switch1 pc. valve closedBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external seal3None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9B (Z) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9N (L) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 60°CM9NWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9N (M) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone1None

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1 Piece(s) Quote KF2514L/SFlange side5 to 60D-M9P (Z) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, internal: anodic oxidationNone5None

SGD 689.50

1 Piece(s) Quote KF2514L/SFlange side5 to 150No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF2514L/SFlange side5 to 150M9J/No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF2514L/SFlange side5 to 150D-M9NJL2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF2514L/SFlange side5 to 150M9NJWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone5None

-

1 Piece(s) Quote KF2514L/SFlange side5 to 150No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-With heater for 120℃

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1 Piece(s) Quote KF2514L/SFlange side5 to 150No auto-switch (no magnet)No switchVMQ 1232-70Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-With heater for 120℃

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1 Piece(s) Quote KF2514L/SFlange side5 to 150℃M9NJWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone3With heater for 120℃

-

1 Piece(s) Quote KF2514L/SFlange side5 to 150℃M9NJWith 2 pcs. (Detection position: Valve opening and closing)VMQ (Formula No.: 1232-70)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal3With heater for 120℃

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1 Piece(s) Quote KF2514L/SFlange surface, left5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF2514L/SFlange surface, left5 to 60°CA93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote KF2514L/SFlange surface, left5 to 60°CA93With 2 pcs. (Detection position: Valve opening and closing)Barrel Perfluoro (Compound No.: 70 W)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 20.5None

-

1 Piece(s) Quote KF2514L/SFlange surface, left5 to 60No auto-switch (with magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF2514L/SFlange surface, left5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote KF2514L/SFlange surface, left5 to 60D-M9B (L) solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote KF2514L/SFlange surface, back5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF2514L/SFlange surface, back5 to 60°CA90With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote KF2514L/SFlange surface, back5 to 60°CA93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11External: hard anodized aluminum, Internal: base materialNone0.5None

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Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

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