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Vacuum Unit, Vacuum Pump System ZX Series

Vacuum Unit, Vacuum Pump System ZX Series

Vacuum unit and vacuum pump system capable of manifolding.
[Features]
・ For electronic parts and small accessory precision parts up to 100 g
・ Ideal combination of functions possible due to modular design
・ Compact and lightweight (120 g when full set of functions) makes it ideal for actuator mounting

(i)Caution

  • CAD data is not available for some models.
  • The product image is a representative image of manifold specifications. Please refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

Vacuum Unit, Vacuum Pump System ZX Series Specifications

ZX100-K15LZ-E□ external appearance

ZX100-K15LZ-E□ external appearance

Vacuum Pump System structural diagram

Vacuum Pump System structural diagram

Component Parts / Replacement Parts

NumberPart NameMaterialNote
1Poppet Valve Assembly-ZX1-PV-0
2Vacuum break flow adjusting needleStainless steelZX1-NA
3Manifold baseAluminum-
4Vacuum switch-ZSE2 and ZSE3
5Valve unit-ZX1-VB□□□□□□-D-□
6Interface plate-(PV) / (PS ⇔ PD)
7Spring returnStainless steel-
Note)8Filter casePolycarbonate-
NumberPart NameMaterialPart Number
9Pilot valve-Please refer to the catalog.
10Filter elementPVAZX1-FE
11Gasket-ZX1-FG
12Filter Case Assembly-ZX1-FK-PC*

*Component parts
Filter case, filter elements, tension bolts (including o-ring)
(Gasket mentioned in number 11 is not included.)

Note) Cautions when handling the filter case:
1) The case is made of polycarbonate, so do not use with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkaline), etc.
2) Do not expose it to direct sunlight.

 

Valve Unit: K1 Type Dimensional Drawings

 

(Unit: mm)

 

ZX100-K1□□□-E□ with vacuum pressure switch (ZSE2)

ZX100-K1□□□-E□ with vacuum pressure switch (ZSE2)

ZX100-K1□□□□-D□□ with vacuum pressure switch (ZSE3)

ZX100-K1□□□□-D□□ with vacuum pressure switch (ZSE3)

Valve Unit: K3 Type Dimensional Drawings

 

(Unit: mm)

 

ZX100-K3□□□-E□ with vacuum pressure switch (ZSE2)

ZX100-K3□□□-E□ with vacuum pressure switch (ZSE2)

ZX100-K3□□□□-F with filter unit (F)

ZX100-K3□□□□-F with filter unit (F)

Valve Unit: K6 Type Dimensional Drawings

 

(Unit: mm)

 

With vacuum pressure switch (ZSE2)

With vacuum pressure switch (ZSE2)

ZX100-K6-F with filter unit (F)

ZX100-K6-F with filter unit (F)

Valve Unit: K8 Type Dimensional Drawings

 

(Unit: mm)

 

ZX100-K8-E□ with vacuum pressure switch (ZSE2)

ZX100-K8-E□ with vacuum pressure switch (ZSE2)

ZX100-K8-F with filter unit (F)

ZX100-K8-F with filter unit (F)

  • Dimensions marked * are for when mounting bracket A
  • Dimensions marked ** are for when mounting spacer 1

Dimensions enclosed in [ ] are for AC

Note) Supply/release valve combinations K5, K6 and J3.
The supply and release valves of this product have been designed to operate using the pressure from the pilot pressure supply (PS) port. The pressure supplied to the pilot supply ports for supply and release (PA and PB) should be as high as or higher than the pressure of the pilot supply port (PS) and as low as or lower than 0.6 MPa.

Notes

  • *See the catalog for information on products other than those above.
  • *The product images are representative images only.
Part Number
ZX100-K6-EC-Y
ZX100-K8-F-Y
ZX100-K15G-F-Y
ZX100-K15HZB-F-Y
ZX100-K15L-EC-Y
ZX100-K15L-EL-Y
ZX100-K15L-F-Y
ZX100-K15LNZ-F-Y
ZX100-K15LOZ-E-Y
ZX100-K15LOZ-ECL-Y
ZX100-K15LOZ-F-Y
ZX100-K15LOZB-F-Y
ZX100-K15LZ-D21-Y
ZX100-K15LZ-D22-Y
ZX100-K15LZ-D22L-Y
ZX100-K15LZ-E-Y
ZX100-K15LZ-E-Y-L
ZX100-K15LZ-EC-Y
ZX100-K15LZ-EC-Y-L
ZX100-K15LZ-ECL-Y
ZX100-K15LZ-F-Y
ZX100-K15LZ-F-Y-L
ZX100-K15LZB-D21C-Y
ZX100-K15LZB-ECL-Y
ZX100-K15LZB-ECL-Y-L
ZX100-K15LZB-F-Y
ZX100-K35HZ-E55L-Y-L
ZX100-K35HZ-EL-Y
ZX100-K35L-F-Y
ZX100-K35LNZ-F-Y
ZX100-K35LOZ-F-Y
ZX100-K35LOZB-F-Y
ZX100-K35LZ-E-Y
ZX100-K35LZ-EC-Y
ZX100-K35LZ-F-Y
ZX100-K35LZB-F-Y
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipType Additional Function Vacuum Port Connecting Port Shape Air Supply Port Connecting Port Shape Application Operating Temp. Range
(°C)
Type of Related Component Combination of supply valve and release valve Rated voltage Electrical entry Light/surge voltage suppressor Manual Output specifications Lead wire specifications Accessories Vacuum switch type Vacuum switch electrical entry Vacuum break flow adjusting needle CE-marked Related parts type details

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1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for VacuumM6M6Single Item5:50-Supply valve, air operated (N.C.) / release valve, external release (ZX1A)Air operatedAir operated--NPN specifications-Bracket AVacuum pressure switch (general use) (ZSE2) + suction filterConnector type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve, air operated (N.O.) / release valve, air operated (N.C.)Air operatedAir operated----Bracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCGrommet typeNoNon-locking push type-Lead wire length 0.3 mBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCGrommet typeWith light/surge voltage suppressorLocking slotted type-Lead wire length: 0.6 mBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeNoNon-locking push typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterConnector type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeNoNon-locking push typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterGrommet type (lead wire length 3 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeNoNon-locking push type-Lead wire length 0.3 mBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type-Without lead wireBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsNo connectorBracket AVacuum pressure switch (general use) (ZSE2) + suction filterGrommet type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsNo connectorBracket AVacuum pressure switch (general use) (ZSE2) + suction filterConnector type (lead wire length 3 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type-No connectorBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorLocking slotted type-No connectorBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitValves For Vacuum Generation / With LED Display, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type2 outputs / no analog outputLead wire length 0.3 mBracket ADigital pressure switch for vacuums (ZSE3)Grommet type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitValves For Vacuum Generation / With LED Display, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type2 outputs / with analog outputLead wire length 0.3 mBracket ADigital pressure switch for vacuums (ZSE3)Grommet type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitValves For Vacuum Generation / With LED Display, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type2 outputs / with analog outputLead wire length 0.3 mBracket ADigital pressure switch for vacuums (ZSE3)Grommet type (lead wire length 3 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterGrommet type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterGrommet type (lead wire length 0.6 m)Lock nut--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterConnector type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterConnector type (lead wire length 0.6 m)Lock nut--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterConnector type (lead wire length 3 m)No--

SGD 351.98

1 Piece(s) 46 Day(s) UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type-Lead wire length 0.3 mBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type-Lead wire length 0.3 mBracket ASuction filter only-Lock nut--

-

1 Piece(s) Quote UnitValves For Vacuum Generation / With LED Display, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorLocking slotted type2 outputs / no analog outputLead wire length 0.3 mBracket ADigital pressure switch for vacuums (ZSE3)Connector type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorLocking slotted typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterConnector type (lead wire length 3 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorLocking slotted typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterConnector type (lead wire length 3 m)Lock nut--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.C.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorLocking slotted type-Lead wire length 0.3 mBracket ASuction filter only-No--

SGD 637.70

1 Piece(s) 46 Day(s) UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCGrommet typeWith light/surge voltage suppressorNon-locking push typePNP specificationsLead wire length: 0.6 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterGrommet type (lead wire length 3 m)Lock nut--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCGrommet typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsLead wire length: 0.6 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterGrommet type (lead wire length 3 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCL-type plug connector typeNoNon-locking push type-Lead wire length 0.3 mBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type-Without lead wireBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type-No connectorBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorLocking slotted type-No connectorBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterGrommet type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Mechanical Type, Pressure Switch for Vacuum / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push typeNPN specificationsLead wire length 0.3 mBracket AVacuum pressure switch (general use) (ZSE2) + suction filterConnector type (lead wire length 0.6 m)No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorNon-locking push type-Lead wire length 0.3 mBracket ASuction filter only-No--

-

1 Piece(s) Quote UnitFilter / Valves For Vacuum Generation / Vacuum Destructive ValveM6M6Single Item5:50-Supply valve (N.O.) / release valve (N.C.)24 V DCL-type plug connector typeWith light/surge voltage suppressorLocking slotted type-Lead wire length 0.3 mBracket ASuction filter only-No--

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