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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

(i)Caution

Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
Refer to the manufacturer's catalog for specification and material details.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications

XMA Series external appearance

XMA Series external appearance

XYA Series external appearance

XYA Series external appearance

Specifications Table

Model		XMA-16	XMA-25 XYA-25	XMA-40 XYA-40	XMA-50 XYA-50	XMA-63 XYA-63	XMA-80 XYA-80
Flange (Valve) Size		16, CF034	25	40, CF070	50	63, CF114	80
Valve Type		Normally closed (pressurize to open, spring seal)
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)		1 × 10^-6 to atmospheric pressure
Conductance L/s ^{Note 1:}		5	14	45	80	160	200
Amount of leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at normal temperature and excluding gas permeation
Operating Time (s)		0.05	0.1	0.21	0.24	0.26	0.28
Flange Type		KF (NW), CF	KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Main Material		Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)		0.4 to 0.7
Pilot Port Connection Port Diameter		M5		Rc 1/8
Weight kg ^{Note 2:}	XMA	0.33 (0.37)	0.61	1.40 (1.76)	2	3.60 (4.96)	6.2
Weight kg ^{Note 2:}	XYA	-	0.66	1.42	2.40	4.30	7.70

Note 1: Conductance is the value for the molecular flow of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Diagram

XMA (angle type), XYA (in-line type) diagram

XMA (angle type), XYA (in-line type) diagram

*Refer to the manufacturer's catalog for maintenance parts.

Drawing

(Unit: mm)

XMA (angle type) dimensional drawing 1

XMA (angle type) dimensional drawing 1

XMA (angle type) dimensional drawing 2

XMA (angle type) dimensional drawing 2

Model	A	B	C	D	Fn	Fd	Fc	G	H	P.C.D L1	L2
XMA-16	40	103	38	1	30	-	34	17	40	P.C.D 27	6 × ø4.4 mm
XMA-25	50	113	48	1	40	-	-	26	39	-	-
XMA-40	65	158	66	2	55	-	70	41	63	P.C.D 58.7	6 × ø6.6 mm
XMA-50	70	170	79	2	75	-	-	52	68	-	-
XMA-63	88	196	100	3	87	95	114	70	69	P.C.D 92.1	8 × ø8.4 mm
XMA-80	90	235	117	3	114	100	-	83	96	-	-

(Unit: mm)

XYA (in-line type) dimensional drawing 1

XYA (in-line type) dimensional drawing 1

XYA (in-line type) dimensional drawing 2

XYA (in-line type) dimensional drawing 2

Model	A	B	C	D	E	Fn	Fd	G	H
XYA-25	100.2	79.5	48	1	23.5	40	-	26	64
XYA-40	130	106	66	2	38	55	-	41	84
XYA-50	178	119	79	2	53	75	-	52	95
XYA-63	209	149	100	3	61	87	95	70	118
XYA-80	268	178	117	3	80	114	110	83	142

Notes

*Refer to the manufacturer's catalog for parts other than those detailed above.
*The product images are representative images only.

: 30; 45; 60

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Part Number
XMA-16
XMA-16-M9//
XMA-16-M9//-XQ1A
XMA-16-M9BA
XMA-16-M9BB
XMA-16-M9BC
XMA-16-M9BLA
XMA-16-M9NA
XMA-16-M9NA-XN1A
XMA-16-M9NB
XMA-16-M9NB-XP1A
XMA-16-M9NB-XQ1A
XMA-16-M9NB-XR2A
XMA-16-M9NC
XMA-16-M9NLA
XMA-16-M9NLA-XQ1A
XMA-16-M9NMA
XMA-16-M9PLA
XMA-16-XN1A
XMA-16-XP1A
XMA-16-XP1B
XMA-16-XP1C
XMA-16-XQ1A
XMA-16A
XMA-16A-M9//
XMA-16A-M9BLA
XMA-16A-M9NA
XMA-16A-M9NA-XN1B
XMA-16A-M9NA-XQ1A
XMA-16A-M9NC
XMA-16A-M9NLA
XMA-16A-M9PLA
XMA-16A-XN1A
XMA-16C
XMA-16C-M9BA
XMA-16C-M9NLC
XMA-16C-M9PA
XMA-16CA
XMA-16CA-M9//
XMA-16CA-M9NLA
XMA-16CF
XMA-16CG
XMA-16CG-M9//
XMA-16CG-M9BA
XMA-16CG-M9PLB
XMA-16CGH0
XMA-16CH0
XMA-16CH0-XQ1A
XMA-16CK-M9//-XS1B
XMA-16CK-M9BLA-XS1B
XMA-16CKH0-XQ1A
XMA-16F
XMA-16F-M9//
XMA-16F-M9BA
XMA-16F-M9BLC
XMA-16FH0
XMA-16G
XMA-16G-M9//
XMA-16G-M9BA
XMA-16G-M9BC

Part Number	Standard Unit Price	Minimum order quantity	Volume Discount	Days to Ship	Flange Type	Flange Nominal	Valve Type	Indicator	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Seal Change Location	Length of Lead Wire for Switch (m)
	SGD 729.05	1 Piece(s)		46 Day(s)	NW	16	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	No auto-switch (with built-in magnet)	No auto switch	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9BL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	Barrel Perfluoro (70W)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	Chemraz (SS630)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	2 pcs. (valve open/closed)	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9NM (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9PL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	Barrel Perfluoro (70W)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	Barrel Perfluoro (70W)	1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	Barrel Perfluoro (70W)	1.3 × 10^-10 (FKM) / 1.3 × 10^-9 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	SGD 735.35	1 Piece(s)		46 Day(s)	NW	16	Angle type	With indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange side	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange side	5 to 60	D-M9BL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange side	5 to 60	D-M9PL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	No indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	No indicator	Flange side	5 to 60	D-M9P (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	With indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	With indicator	Flange side	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	With indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	With indicator	Flange surface, left	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	With indicator	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	With indicator	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	With indicator	Flange surface, back	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	With indicator	Flange surface, back	5 to 60	D-M9PL (solid-state auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	With indicator	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	No indicator	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	No indicator	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	No indicator	Flange surface, left	5 to 60	No auto-switch (with built-in magnet)	No auto switch	VMQ (1232-70)	1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	No indicator	Flange surface, left	5 to 60	D-M9BL (solid-state auto switch)	2 pcs. (valve open/closed)	VMQ (1232-70)	1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	[Others] CF	16	Angle type	No indicator	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No auto switch	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange surface, left	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange surface, left	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange surface, left	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange surface, left	5 to 60	D-M9BL (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	SGD 739.20	1 Piece(s)		46 Day(s)	NW	16	Angle type	With indicator	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange surface, back	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
	-	1 Piece(s)		Quote	NW	16	Angle type	With indicator	Flange surface, back	5 to 60	D-M9B (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-

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Basic Information

Type	Air-Actuated Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows Seal

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Specification/Dimensions

Flange Type
- NW
- Others
  - CF
  - DN
Clear
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
Clear
Valve Type
- Angle type
- In-line type
Clear
Indicator
- No indicator
- With indicator
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
D-M9B (solid-state auto switch)

D-M9BL (solid-state auto switch)

D-M9BM (solid-state auto switch)

D-M9BZ (solid-state auto switch)

D-M9N (solid-state auto switch)

D-M9NL (solid-state auto switch)

D-M9NM (solid-state auto switch)

D-M9NZ (solid-state auto switch)

D-M9P (solid-state auto switch)

D-M9PL (solid-state auto switch)

M9B

M9N

M9P

D-A90 (reed auto switch)

D-A90L (reed auto switch)

A93

D-A93 (reed auto switch)

D-A93L (reed auto switch)

D-A93Z (reed auto switch)

No auto-switch (no built-in magnet)

No auto-switch (with built-in magnet)
Clear
Number of Switches
- 1 pc. (valve closed)
- 1 pc. (valve open)
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. (valve open/closed)
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
Clear
Seal material
Chemraz (Compound No.: SSE38)

Chemraz (SSE38)

Barrel Perfluoro (70W)

Barrel Perfluoro (Compound No.: 70 W)

Chemraz (Compound No.: SS592)

Chemraz (SS592)

Chemraz (SS630)

VMQ (1232-70)

VMQ (Formula No.: 1232-70)

FKM (1349-80)

FKM (Formula No.: 1349-80)

EPDM (2101-80)

EPDM (Formula No.: 2101-80)

FKM for Plasma (3310-75)

Kalrez (4079)

Kalrez (Compound No.: 4079)
Clear
Amount of leakage(Pa·m³/s)
- 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- 1.3 × 10^-10 (FKM) / 1.3 × 10^-9 (FKM) (internal/external)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- 1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
- 1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
Clear
Seal Change Location
External seal

None

Valve seal

Valve seal / external seal
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
Clear
type
- XMA
- XYA
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

46 Day(s) or Less
Clear

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The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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