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Vacuum Pad, Standard Small Type, VPMB, One-touch Fitting Type (Part Numbers)
Small vacuum pad ideal for use in semiconductor manufacturing equipment, *CAD data currently being revised for this series. This will be available as soon as modifications are complete.
Japanese Only
Part Number
Configured Part Number is shown.
Dimensions
Standard table
| Model code | Tube O.D. øD | Pad O.D. ød | B | L | Tube end C | E | Connection config. code |
|---|---|---|---|---|---|---|---|
| VPMB0.7RM[5]-180J | 1.8 | 0.7 | 15 | 4 | 8.4 | 12 | -T4 |
| VPMB0.7RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
| VPMB1RM[5]-180J | 1.8 | 1 | 8.4 | 12 | |||
| VPMB1RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
| VPMB1.5RM[5]-180J | 1.8 | 1.5 | 8.4 | 12 | |||
| VPMB1.5RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
| VPMB2RM[5]-180J | 1.8 | 2 | 8.4 | 12 | |||
| VPMB2RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
| VPMB3RM[5]-180J | 1.8 | 3 | 8.4 | 12 | |||
| VPMB3RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
| VPMB4RM[5]-180J | 1.8 | 4 | 8.4 | 12 | |||
| VPMB4RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
| VPMB6R[5]-180J | 1.8 | 6 | 19.5 | 7 | 8.4 | 12.5 | -T8 |
| VPMB6RM[5]-4J[9] | 4 | 10.9 | 15.5 | ||||
| VPMB8R[5]-180J | 1.8 | 8 | 18 | 5.5 | 8.4 | 12.5 | |
| VPMB8RM[5]-4J[9] | 4 | 10.9 | 15.5 | ||||
| VPMB10R[5]-180J | 1.8 | 10 | 27 | 8 | 8.4 | 13.7 | -M4 |
| VPMB10R[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
| VPMB15R(A)[5]-180J | 1.8 | 15 | 28(29) | 9(10) | 8.4 | 13.7 | |
| VPMB15R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
| VPMB20R(A)[5]-180J | 1.8 | 20 | 31.2(32.2) | 10(11) | 8.4 | 13.7 | -M6 |
| VPMB20R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
| VPMB25R(A)[5]-180J | 1.8 | 25 | 32.2(33.2) | 11(12) | 8.4 | 13.7 | |
| VPMB25R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
| VPMB30R(A)[5]-180J | 1.8 | 30 | 32.2(35.2) | 11(14) | 8.4 | 13.7 | |
| VPMB30R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
| VPMB40R(A)[5]-180J | 1.8 | 40 | 35.2(38.7) | 14(17.5) | 8.4 | 13.7 | |
| VPMB40R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
| VPMB50R(A)[5]-180J | 1.8 | 50 | 36.2(39.2) | 15(18) | 8.4 | 13.7 | |
| VPMB50R(A)[5]-4J[9] | 4 | 10.9 | 17.5 |
Units: mm
*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.
| Part Number |
|---|
| Part Number | Minimum order quantity | Volume Discount | Days to Ship | RoHS | Pad Shape | Mounting Method | Rubber Group Material | Environment | Color | Outer Diameter d (φ) | Height L1 (mm) | Full length B (mm) | Mount Connection Screw | Vacuum Outlet Tube Outer Diameter (φ) | Metal parts material |
|---|
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Basic Information
| Pad Type | Standard / Holder Set | Material | Rubber-based | Mounting Fitting | Fixed Type |
|---|---|---|---|---|---|
| Vacuum Outlet Direction | Horizontal | Fall Prevention Valve | None | Direct Attached Filter | None |
Specification/Dimensions
-
Pad Shape
- Deep Type
- Small
-
Mounting Method
- Recessed Type
- Pad Screw Fixed
-
Rubber Group Material
- Nitrile Rubber
- NBR which conforms to Food Sanitation Law
- Silicon Rubber
- Urethane Rubber
- Fluorine Rubber
- Nitrile Rubber
-
Environment
- Standard
- Static electricity diffusion
-
Color
- Black
- Gray
- White
- Blue
-
Outer Diameter d(φ)
-
Height L1(mm)
-
Full length B(mm)
-
Mount Connection Screw
- M3 × 0.5
- M4 × 0.7
- M5 × 0.8
-
Vacuum Outlet Tube Outer Diameter(φ)
- 1.8
- 3
- 4
-
Metal parts material
- Copper-free specification
- Standard Specifications
-
type
- VPMB
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 9 Day(s) or Less
- 10 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
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