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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
Refer to the manufacturer's catalog for specification and material details.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

■Please refer to the following for the details of the auto switch D-M9NJ.

: 30; 45; 60

Part Number
XLG-16-2
XLG-16-2-XN1A
XLG-16-2-XN1B
XLG-16-2-XN1C
XLG-16-2M9//
XLG-16-2M9BA
XLG-16-2M9BC
XLG-16-2M9BLA
XLG-16-2M9BLB
XLG-16-2M9BZA
XLG-16-2M9NA
XLG-16-2M9NLA
XLG-16-2M9PLA
XLG-16H0-2
XLG-16K-2M9//
XLG-16K-2M9BLA
XLG-16L-2
XLG-16L-2M9BA
XLG-16L-2M9BLA
XLG-16L-2M9BLB
XLG-16L-2M9NA
XLG-16M-2M9BLB
XLG-25-2
XLG-25-2A93A
XLG-25-2M9//
XLG-25-2M9//-XA
XLG-25-2M9BA
XLG-25-2M9BC
XLG-25-2M9BLA
XLG-25-2M9BLA-XN1A
XLG-25-2M9BLB
XLG-25-2M9BZA
XLG-25-2M9BZB
XLG-25-2M9NA
XLG-25-2M9NC
XLG-25-2M9NLA
XLG-25-2M9NLB
XLG-25-2M9NMA
XLG-25-2M9NZA
XLG-25-2M9PLA
XLG-25H0-2M9NJLA
XLG-25H0-2M9NJLB
XLG-25H5-2M9NJLA
XLG-25K-2
XLG-25K-2A93A
XLG-25K-2A93A-XN1A
XLG-25K-2A93A-XP1A
XLG-25K-2A93A-XP1B
XLG-25K-2A93A-XQ1A
XLG-25K-2A93A-XQ1C
XLG-25K-2A93A-XQ1E
XLG-25K-2A93A-XR1A
XLG-25K-2A93A-XR2A
XLG-25K-2A93A-XR3A
XLG-25K-2M9BA
XLG-25K-2M9BLA
XLG-25K-2M9BLB
XLG-25KH0-2
XLG-25KH0-2M9NJLA
XLG-25L-2

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Body Surface Treatment	Seal Change Location	Length of Lead Wire for Switch (m)	Heater Yes/No
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	EPDM 2101-80	Internal: 1.3 × ^-8, External: 1.3 × ^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	-	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	EPDM 2101-80	Internal: 1.3 × ^-8, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2	-	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	EPDM 2101-80	Internal: 1.3 × ^-10, External: 1.3 × ^-8	External: hard anodized aluminum, Internal: base material	External seal	-	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	No auto-switch (with magnet)	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
SGD 886.32	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	M9B	With 1 pc. (Detection position: Valve opening)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	M9N	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 60	M9P	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	16	Flange side	5 to 150	No auto-switch (no magnet)	No auto switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	Flange surface, left	5 to 60	No auto-switch (with magnet)	No auto switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	Flange surface, left	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	16	Flange surface, back	5 to 60	-	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	16	Flange surface, back	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	16	Flange surface, back	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	16	Flange surface, back	5 to 60	M9B	With 1 pc. (Detection position: Valve opening)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	16	Flange surface, back	5 to 60	M9N	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	16	Flange surface, right	5 to 60	M9B	With 1 pc. (Detection position: Valve opening)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
SGD 801.97	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	No auto-switch (no magnet)	No auto switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	No auto-switch (with magnet)	No auto switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	No auto-switch (with magnet)	No auto switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, internal: anodic oxidation	None	-	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
SGD 917.47	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	EPDM 2101-80	Internal: 1.3 × ^-8, External: 1.3 × ^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	3	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-M9B solid-state auto switch	1 pc. valve open	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-M9N solid-state auto switch	1 pc. valve closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	M9N	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	M9N	With 1 pc. (Detection position: Valve opening)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	M9N	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	1	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	D-M9N solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	5	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 60	M9P	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 150	D-M9NJL	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 150	D-M9NJL	1 pc. valve open	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange side	5 to 150	D-M9NJL	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	3	With heater for 120℃
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	-	No auto switch	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	EPDM (Formula No.: 2101-80)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	Barrel Perfluoro (Compound No.: 70 W)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	Barrel Perfluoro (Compound No.: 70 W)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	D-A93 reed auto switch (Flange size 16 not supported)	2 pcs. valve open/closed	Kalrez 4079	Internal: 1.3 × ^-8, External: 1.3 × ^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	Kalrez (Compound No.: 4079)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	External seal	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	Kalrez (Compound No.: 4079)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	Chemraz (Compound No.: SS592)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	Chemraz (Compound No.: SS630)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	A93	With 2 pcs. (Detection position: Valve opening and closing)	Chemraz (Compound No.: SSE38)	Internal: 1.3 × 10^-8 External: 1.3 × 10^-8	External: hard anodized aluminum, Internal: base material	Valve seal 1 / valve seal 2 / external seal	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	M9B	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	0.5	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	D-M9B solid-state auto switch	2 pcs. valve open/closed	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 60	M9B	With 1 pc. (Detection position: Valve opening)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 150	No auto-switch (no magnet)	No auto switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None
-	1 Piece(s)	Quote	KF	25	Flange surface, left	5 to 150	M9NJ	With 2 pcs. (Detection position: Valve opening and closing)	FKM (Formula No.: 1349-80)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-10	External: hard anodized aluminum, Internal: base material	None	3	None
-	1 Piece(s)	Quote	KF	25	Flange surface, back	5 to 60	No auto-switch (no magnet)	No auto switch	FKM 1349-80	Internal: 1.3 × ^-10, External: 1.3 × ^-10	External: hard anodized aluminum, Internal: base material	None	-	None

Basic Information

Type	Pilot Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Elastic Seal

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165 Part Numbers

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Completed

Specification/Dimensions

Flange Type
- KF
- K
Clear
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
D-M9B solid-state auto switch

D-M9N solid-state auto switch

D-M9NJL

M9B

M9N

M9NJ

M9P

A93

D-A93 reed auto switch (Flange size 16 not supported)

No auto-switch (no magnet)

No auto-switch (with magnet)
Clear
Number of Switches
- 1 pc. valve closed
- 1 pc. valve open
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. valve open/closed
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
Clear
Seal material
Chemraz (Compound No.: SSE38)

Barrel Perfluoro (Compound No.: 70 W)

Chemraz (Compound No.: SS592)

Chemraz (Compound No.: SS630)

FKM 1349-80

FKM (Formula No.: 1349-80)

EPDM 2101-80

EPDM (Formula No.: 2101-80)

FKM for Plasma (Compound No.: 3310)

Kalrez 4079

Kalrez (Compound No.: 4079)
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × ^-10, External: 1.3 × ^-10
- Internal: 1.3 × ^-10, External: 1.3 × ^-8
- Internal: 1.3 × ^-8, External: 1.3 × ^-10
- Internal: 1.3 × ^-8, External: 1.3 × ^-8
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-8
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-10
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-8
Clear
Body Surface Treatment
- External: hard anodized aluminum, Internal: base material
- External: hard anodized aluminum, internal: anodic oxidation
Clear
Seal Change Location
Valve seal 1 / valve seal 2

Valve seal 1 / valve seal 2 / external seal

External seal

None
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
Clear
Heater Yes/No
- With heater for 100°C
- With heater for 120℃
- None
Clear
type
- XLG
- XLG-16
- XLG-25
- XLG-40
- XLG-50
- XLG-63
- XLG-80
Clear
CAD
- 2D
- 3D
Clear

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The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

(i)Caution

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

(i)Caution

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Body Surface Treatment

Seal Change Location

Length of Lead Wire for Switch(m)

Heater Yes/No

type

CAD

Specify Alterations

Tech Support

Payment Method more

About MISUMI

About this Website

Useful Tools

Customer Service

Social Media

MISUMI Contact 9:00 am – 6:00 pm (Mon – Fri), 9:00 am – 3 pm (Sat)

Amount of leakage(Pa·m³/s)