Mass Flow Controller 20SLM He
Caution
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Product Description
【Product Specifications】
・Model number： C1020-4S2-20L-He
・Flow rate (SLM)： 20
・Gas： He
・Flow rate accuracy： +/- 2% FS (accuracy guaranteed range： 15 - 35℃)
・Reproducibility： +/- 0.2% FS
・Flow rate control range： 5 - 100% FS
・Fluid： Gas
・Available temperature： 5 - 50℃ 85%RH or less
・Responsiveness： 6sec
・Operation pressure range： 50 - 300kPa
・Pressure resistance： 1MPa (G)
・External leak rate： 1 x 10 - 7Pa, m3/sec (He) or less
・Gas contact unit material： Stainless Steel (SUS316), PTFE, fluorine Rubber
・Surface treatment： Mechanical processing finish
・Fittings： Equivalent to 1/4in.SWL
・Input and output： Analog signal (0 - 5VDC)
・Valve type： N/O normal open
・Drive power： +15VDC +/- 5% 60mA, -15VDC +/- 5% 150mA
・Communication system： Analog 0 - 5VDC (D-Sub9Pin connector)
・Size： 160 x 33.6 x 105mm