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Vacuum Rodless Cylinder CYV Series

Vacuum Rodless Cylinder CYV Series

A low-dust-generation type air cylinder, usable for transport in vacuum environments.
[Features]
· Being able to be placed in a vacuum chamber helps contribute to making more compact and simplified transport systems.
· Stainless steel linear guide and low-dust-generation vacuum grease.
· Reduced initial dust generation for reduced dust generated at the stroke end.
· Uses a magnetic rodless cylinder which has no sliding-induced external leaks.
· Outgassing has been reduced by surface treatments and the plastic/resin materials eliminated.
· Tube internal diameter: 15 mm, Magnetic attractive force: 59 N. Piping connection port diameter: 5/16-24 UNF.
· Tube internal diameter: 32 mm, Magnetic attractive force: 268 N. Piping connection port diameter: 7/16-20 UNF.

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • Product images may be representative images. Refer to the manufacturer's catalog for shape details.

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Vacuum Rodless Cylinder CYV Series Specifications

Vacuum Rodless Cylinder CYV Series external appearance

Vacuum Rodless Cylinder CYV Series external appearance

Vacuum Rodless Cylinder CYV Series example application

Vacuum Rodless Cylinder CYV Series example application

*The concept drawing above is an example showing how to install the cylinder. However, it is not to fulfill all the vacuum-chamber usage conditions.

Specifications

  • Operating environment pressure: atmospheric to 1.3 × 10-4 Pa (ABS)
  • Operating environment atmosphere (*1): air and inert gases
  • Operating fluid (*1): air and inert gases
  • Operation type: double action
  • Guaranteed proof pressure: 0.5 MPa
  • Operating pressure range: 0.05 to 0.3 MPa
  • Leak amount: 1.3 × 10-7 Pa·m3/sec or less (at normal temperature, excluding gas permeation)
  • Maximum baking temperature (*2, *3): 100°C
  • Ambient and operating fluid temperature: -10 to +60°C (no freezing)
  • Maximum operating piston speed (*4): 50 to 300 mm/s
  • Stroke adjustable amount: Each side -2 to 0 mm (both sides -4 to 0 mm)
  • Cushioning: sine cushion (air cushioning)
  • Lubrication method: vacuum grease for linear guide and in cylinder tube
  • *1 Air is recommended for the operating environment atmosphere and operating liquid. If using other inert gases, the product lifespan and other variables may vary. Contact the SMC support center for details.
  • *2 This baking is limited to baking before cylinder operation. For cylinder operation, use a temperature range of -10 to +60°C.
  • *3 Contact the SMC support center if the baking temperature is to exceed 100°C.
  • *4 The operating piston speed above indicates the maximum speed. From the beginning of slide table movement at the stroke end until the end of the cushion stroke takes approx. 0.5 seconds (one side) or 1 second for both sides.

Weight List

CYV15 Standard Stroke

  • 100 mm: 1.2 kg
  • 150 mm: 1.4 kg
  • 200 mm: 1.6 kg
  • 250 mm: 1.7 kg
  • 300 mm: 1.9 kg
  • 350 mm: 2 kg
  • 400 mm: 2.2 kg
  • 450 mm: 2.4 kg
  • 500 mm: 2.5 kg
  • 600 mm: 2.8 kg
  • 700 mm: 3.2 kg

CYV32 Standard Stroke

  • 100 mm: 4.2 kg
  • 150 mm: 4.6 kg
  • 200 mm: 5 kg
  • 250 mm: 5.5 kg
  • 300 mm: 5.9 kg
  • 350 mm: 6.3 kg
  • 400 mm: 6.7 kg
  • 450 mm: 7.1 kg
  • 500 mm: 7.5 kg
  • 600 mm: 8.3 kg
  • 700 mm: 9.1 kg

Theoretical Output List

Tube Inner Diameter: 15 mm, Piston Area: 176 mm2 Theoretical Output

  • Operating pressure 0.1 MPa: 18 N
  • Operating pressure 0.2 MPa: 35 N
  • Operating pressure 0.3 MPa: 53 N

Tube Inner Diameter: 32 mm, Piston Area: 804 mm2 Theoretical Output

  • Operating pressure 0.1 MPa: 80 N
  • Operating pressure 0.2 MPa: 161 N
  • Operating pressure 0.3 MPa: 241 N

Product Features

Its non-contact structure ensures no contact between the outer surface of the cylinder tube and the inner surface of the slide table, eliminating the generation of dust caused by sliding friction

Its non-contact structure ensures no contact between the outer surface of the cylinder tube and the inner surface of the slide table, eliminating the generation of dust caused by sliding friction

Special cylinder tube, long stroke (max 700 mm)

Special cylinder tube, long stroke (max 700 mm)

Uses a special cylinder tube made of extruded aluminum
As the cylinder is directly attached to the rail base, there is no deflection, even with long strokes. The use of a linear guide ensures this non-contact structure

O-ring seals separate the vacuum and atmosphere

O-ring seals separate the vacuum and atmosphere

*To allow fine adjustments to be made to the stroke, O-rings are installed to separate the vacuum from the atmosphere. Contact SMC if you require a different sealing method.

Can be fine-tuned at the end of the stroke - Fine adjustments can be made on one side (-2 to 0 mm) or both sides together (-4 to 0 mm)

Can be fine-tuned at the end of the stroke
Fine adjustments can be made on one side (-2 to 0 mm) or both sides together (-4 to 0 mm)

Product Drawing

 

(Unit: mm)

 

Vacuum Rodless Cylinder CYV Series dimensional drawing

Vacuum Rodless Cylinder CYV Series dimensional drawing

ModelABCEEDEKFGHHAHIHLHPJJKKLLD
CYV15810.56.46H9 (0 to +0.030)9.5412.51045232337.644M6 × 11021675.6
CYV32121610.24H9 (0 to +0.030)13625975393963.373.5M10 × 1.51220909.2
ModelLWMMMNPPAPBPCQQWRTTATBTCWYZ
CYV1569M4 × 0.764.55/16-24UNF25601011248453020150.5692.5132
CYV32115M6 × 187.57/16-20UNF50100121478379.53422.5200.51153.5165

*See the individual product notes in the SMC catalog (cushioning effect [sine cushion] and stroke adjustment).

Product Structural Drawing

CYV15 structural drawing

CYV15 structural drawing

CYV32 structural drawing

CYV32 structural drawing

NumberPart NameMaterialNote
1Magnet A--
2Piston-Side YokeRolled steel plateZinc chromate
3PistonBrass / aluminum alloyElectroless nickel plating / chromate
4Piston SealFluororubber-
5Wear RingSpecial bearing-
6ShaftStainless steel-
7Cushion RingStainless steel / brass- / electroless nickel plating
8Magnet B-Titanium nitride coating
9External Slider Side YokeRolled steelElectroless nickel plating
10Hold SpacerAluminum alloyElectroless nickel plating
11Slide TableAluminum alloyElectroless nickel plating
12Insertion Guide PlateStainless steel-
13Cross-Head Pan Head ScrewStainless steel-
14Side Plate AAluminum alloyElectroless nickel plating
15Side Plate BAluminum alloyElectroless nickel plating
16Hexagon Socket Head BoltStainless steel-
17Spring WasherStainless steel-
18Flat WasherStainless steel-
19Plate AAluminum alloyElectroless nickel plating
20Plate BAluminum alloyElectroless nickel plating
21Cushion SealFluororubber-
22Inner CoverAluminum alloyElectroless nickel plating
23Cylinder Tube GasketFluororubber-
24O-ringFluororubber-
25O-ringFluororubber-
26Hex Socket Head Set ScrewStainless steel-
27Hexagon Socket Head BoltStainless steel-
28Flat WasherStainless steel-
29Cross-Head Pan Head ScrewStainless steel-
30Hexagon Socket Head BoltStainless steel-
31Rail baseAluminum alloyElectroless nickel plating
32Cylinder TubeAluminum alloyElectroless nickel plating
33Tube Attaching BracketAluminum alloyElectroless nickel plating
34Hexagon Socket Head BoltStainless steel-
35Flat WasherStainless steel-
36Hexagon Socket Head BoltStainless steel-
37Flat WasherStainless steel-
38Top CoverAluminum alloyElectroless nickel plating
39Cushion Seal HolderAluminum alloyChromate
40O-ringFluororubber-
41O-ringFluororubber-
42Linear GuideStainless steel-
43Holding PlateAluminum alloyHard anodized aluminum
  • *In the Materials and Notes columns of the list above, the first description is for CYV15, and the second description is for CYV32.

Precautions

  • *Open the inner package of the double packaged clean series in a clean room or other clean environment.
  • *Do not use bare hands to install the cylinder. Doing so can cause the outgassing characteristics to degrade.
  • *Fully exhaust the compressed air in the piping outside of the clean room before replacing parts in the chamber or disassembling.
  • *See the SMC catalog for product information other than that detailed above.
Part Number
CYV15-100
CYV15-150
CYV15-200
CYV15-250
CYV15-300
CYV15-350
CYV15-400
CYV15-450
CYV15-500
CYV15-600
CYV15-700
CYV32-100
CYV32-150
CYV32-200
CYV32-250
CYV32-300
CYV32-350
CYV32-400
CYV32-450
CYV32-500
CYV32-600
CYV32-700
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipStroke
(mm)
Max. Load Mass (Horizontal Mounting)
(kg)
Max. Load Mass
(kg)
Table Size: Length L
(mm)
Cylinder I.D.
(Ø)
Table Size: Width W
(mm)
Table Size: Height H
(mm)

SGD 4,361.70

1 Piece(s) 46 Day(s) 1001~4.9167156945

SGD 4,545.57

1 Piece(s) 46 Day(s) 1501~4.9167156945

SGD 4,729.32

1 Piece(s) 46 Day(s) 2001~4.9167156945

SGD 4,913.18

1 Piece(s) 46 Day(s) 2501~4.9167156945

SGD 5,096.93

1 Piece(s) 46 Day(s) 3001~4.9167156945

SGD 5,280.80

1 Piece(s) 46 Day(s) 3501~4.9167156945

SGD 5,464.55

1 Piece(s) 46 Day(s) 4001~4.9167156945

SGD 5,648.42

1 Piece(s) 46 Day(s) 4501~4.9167156945

SGD 5,832.17

1 Piece(s) 46 Day(s) 5001~4.9167156945

SGD 6,199.78

1 Piece(s) 46 Day(s) 6001~4.9167156945

SGD 6,567.52

1 Piece(s) 46 Day(s) 7001~4.9167156945

SGD 6,379.80

1 Piece(s) 46 Day(s) 1005~9.25903211575

SGD 6,605.78

1 Piece(s) 46 Day(s) 1505~9.25903211575

SGD 6,831.65

1 Piece(s) 46 Day(s) 2005~9.25903211575

SGD 7,057.63

1 Piece(s) 46 Day(s) 2505~9.25903211575

SGD 7,283.62

1 Piece(s) 46 Day(s) 3005~9.25903211575

SGD 7,509.48

1 Piece(s) 46 Day(s) 3505~9.25903211575

SGD 7,735.47

1 Piece(s) 46 Day(s) 4005~9.25903211575

SGD 7,961.33

1 Piece(s) 46 Day(s) 4505~9.25903211575

SGD 8,187.32

1 Piece(s) 46 Day(s) 5005~9.25903211575

SGD 8,639.17

1 Piece(s) 46 Day(s) 6005~9.25903211575

SGD 9,091.02

1 Piece(s) 46 Day(s) 7005~9.25903211575

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Basic Information

Type Rodless Cylinder Table Material Aluminum Alloy Rodless Cylinder Joint Type Magnetic
Environment Vacuum Table Surface Treatment Electroless Nickel Plating Guide Type Linear guide type
Operating Speed(mm/s) 50::300 Operating Pressure(MPa) 0.05 to 0.3 Cushion Sine cushion (air cushion)

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