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Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series (Part Numbers)

Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

■Please refer to the following for the details of the auto switch D-M9NJ.

Part Number
XLG-40-2M9NLB
XLG-40H0-2
XLG-40H5-2M9NJZA
XLG-40K-2
XLG-40K-2M9//
XLG-40K-2M9BA
XLG-40K-2M9BLA
XLG-40K-2M9NA
XLG-40KH0-2
XLG-40KH0-2M9NJLA
XLG-40L-2
XLG-40L-2-XQ1A
XLG-40L-2M9//
XLG-40L-2M9BA
XLG-40L-2M9BC
XLG-40L-2M9BLA
XLG-40L-2M9NA
XLG-40L-2M9NB
XLG-40L-2M9NLA
XLG-40M-2
XLG-40M-2M9BLB
XLG-50-2
XLG-50-2-XAQ1A
XLG-50-2A93A
XLG-50-2M9//
XLG-50-2M9BA
XLG-50-2M9BB
XLG-50-2M9BC
XLG-50-2M9BLA
XLG-50-2M9BLA-XN1A
XLG-50-2M9BLB
XLG-50-2M9BZA
XLG-50-2M9BZB
XLG-50-2M9NA
XLG-50-2M9NC
XLG-50H0-2
XLG-50K-2
XLG-50K-2M9BA
XLG-50K-2M9BLA
XLG-50L-2
XLG-50L-2A93A
XLG-50L-2M9BA
XLG-50L-2M9NA
XLG-50L-2M9PA
XLG-50M-2A93A
XLG-63-2
XLG-63-2M9//
XLG-63-2M9BA
XLG-63-2M9BC
XLG-63-2M9BZA
XLG-63-2M9NA
XLG-63-2M9NC
XLG-63D-2M9BA
XLG-63DL-2M9//
XLG-63DL-2M9NC
XLG-63H4-2
XLG-80-2
XLG-80-2A93A
XLG-80-2A93B
XLG-80-2M9//
XLG-80-2M9BC
XLG-80-2M9BLA
XLG-80-2M9BLB
XLG-80-2M9BZA
XLG-80-2M9NA
XLG-80-2M9NLB
XLG-80-2M9NZC
XLG-80D-2M9//
XLG-80H4-2
XLG-80K-2M9BLA
XLG-80L-2
XLG-80L-2M9//
XLG-80L-2M9BA
XLG-80L-2M9PA
XLG-80M-2M9BLA
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

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1 Piece(s) Quote KF40Flange side5 to 60M9NWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF40Flange side5 to 150No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF40Flange side5 to 150M9NJNo auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone5With heater for 120℃

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1 Piece(s) Quote KF40Flange surface, left5 to 60-No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF40Flange surface, left5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF40Flange surface, left5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF40Flange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF40Flange surface, left5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF40Flange surface, left5 to 150No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF40Flange surface, left5 to 150M9NJWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF40Flange surface, back5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF40Flange surface, back5 to 60No auto-switch (no magnet)No auto switchKalrez 4079Internal: 1.3 × -8, External: 1.3 × -8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

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1 Piece(s) Quote KF40Flange surface, back5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF40Flange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF40Flange surface, back5 to 60M9BWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF40Flange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF40Flange surface, back5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF40Flange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF40Flange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF40Flange surface, right5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF40Flange surface, right5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF50Flange side5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF50Flange side5 to 60-No auto switchKalrez (Compound No.: 4079)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external seal-None

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1 Piece(s) Quote KF50Flange side5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange side5 to 60No auto-switch (with magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF50Flange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange side5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF50Flange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × -8, External: 1.3 × -8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal3None

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1 Piece(s) Quote KF50Flange side5 to 60D-M9B solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF50Flange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF50Flange side5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF50Flange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange side5 to 60M9NWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange side5 to 150No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF50Flange surface, left5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF50Flange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF50Flange surface, back5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF50Flange surface, back5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange surface, back5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange surface, back5 to 60M9PWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF50Flange surface, right5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF63Flange side5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF63Flange side5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF63Flange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF63Flange side5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF63Flange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF63Flange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF63Flange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote K63Flange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote K63Flange surface, back5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote K63Flange side5 to 60D-M9N solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF63Flange side5 to 150No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-With heater for 100°C

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1 Piece(s) Quote KF80Flange side5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF80Flange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80Flange side5 to 60A93With 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80Flange side5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF80Flange side5 to 60M9BWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote KF80Flange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80Flange side5 to 60D-M9B solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80Flange side5 to 60M9BNo auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote KF80Flange side5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80Flange side5 to 60M9NWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80Flange side5 to 60M9NWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote K80Flange side5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

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1 Piece(s) Quote KF80Flange side5 to 150No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-With heater for 100°C

-

1 Piece(s) Quote KF80Flange surface, left5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone3None

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1 Piece(s) Quote KF80Flange surface, back5 to 60No auto-switch (no magnet)No auto switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF80Flange surface, back5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF80Flange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80Flange surface, back5 to 60M9PWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote KF80Flange surface, right5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

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Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Elastic Seal

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