Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series
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- Refer to the manufacturer's catalog for specification and material details.
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Product Description
A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.
Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series Specifications
XLAV external appearance (side)
| Model | XLA(V)-16 | XLA (V)-25 | XLA(V)-40 | XLA(V)-50 | XLA(V)-63 | |
|---|---|---|---|---|---|---|
| Valve Type | Normally closed (pressurize to open, spring seal) | |||||
| Fluids | Inert gas vacuum | |||||
| Operating Temperature °C | XLAV | 5 to 50 | ||||
| Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | |||||
| Conductance L/s Note 1: | 5 | 14 | 45 | 80 | 160 | |
| Amount of leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | ||||
| External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | |||||
| Flange Type | KF (NW) | KF (NW) / K (DN) | ||||
| Main Material | Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material) | |||||
| Surface Treatment | External: hard anodized aluminum, Internal: base material | |||||
| Pilot Pressure MPa (G) | 0.4 to 0.7 | |||||
| Pilot Port Connection Port Diameter | XLAV | M5: 1 (P) / 3 (R) ports | Rc1/8: 1 (P) port, M5: 3 (R) ports | |||
| Weight (kg) | XLAV | 0.29 | 0.49 | 1.14 | 1.64 | 2.96 |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
Structure/Operation
With solenoid valve
Valve side exhaust
*Refer to the manufacturer's catalog for maintenance parts.
By applying pressure from the pilot port, the valve linked to the piston overcomes the spring force and actuating force and opens.
XLAV normally applies pilot pressure to the 1 (P) port. The valve opens when the solenoid valve is on and closes when it is off.
Drawing
XLAV dimensional drawing with solenoid valve
(Unit: mm)
| Model | J | K | L | M | N |
|---|---|---|---|---|---|
| XLAV-16 | 35.5 | 12.3 | 10.2 | 3.6 | 3.6 |
| XLAV-25 | 40.5 | 13.8 | 10.2 | 3.6 | 3.6 |
| XLAV-40 | 50.5 | 21.6 | 10.2 | 3.6 | 3.6 |
| XLAV-50 | 57 | 24.6 | 10.2 | 3.6 | 3.6 |
| XLAV-63 | 78.5 | 28.7 | 12 | 4 | 2 |
XLAV dimensional drawing
A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type.
(Unit: mm)
| Model | A | B | C | D | E Note 1: | Fn | Fd | G | H |
|---|---|---|---|---|---|---|---|---|---|
| XLAV-16 | 40 | 103 | 38 | 1 | - | 30 | - | 17 | 40 |
| XLAV-25 | 50 | 113 | 48 | 1 | 12 | 40 | - | 26 | 39 |
| XLAV-40 | 65 | 158 | 66 | 2 | 11 | 55 | - | 41 | 63 |
| XLAV-50 | 70 | 170 | 79 | 2 | 11 | 75 | - | 52 | 68 |
| XLAV-63 | 88 | 196 | 100 | 3 | 11 | 87 | 95 | 70 | 69 |
Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Notes
- *See the catalog for information on products other than those above.
- *The product images are representative images only.