SFE Series Exhaust Filter For Clean Room
Caution
- Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
- See the catalog for specification details.
- Product images may be representative images. Refer to the catalog for details.
Product Description
Exhaust cleaner that enables direct exhaust of air in a clean room by simply attaching it to the air equipment in the clean room.
[Features]
· Enables direct exhaust of air in a clean room (cleanliness class 4: ISO14644-1).
· No need for piping for exhaust air and relief air.
· Reduces piping installation work and space.
· Noise reduction: 30 dB (A) or more.
· RoHS compliant.
SFE Series Exhaust Filter For Clean Room Specifications
SFE Series (male thread type) external appearance
| Symbol | Port size | Maximum flow capacity L/min (ANR) |
|---|---|---|
| 11 | M5 × 0.8 | 3 |
| 42 | R 1/8 | 65 |
| 52 | R 1/8 | 130 |
| 53 | R 1/4 | 130 |
| 73 | R 1/4 | 200 |
SFE Series (plug-in type) external appearance
| Symbol | Port size | Maximum air flow L/min (ANR) |
|---|---|---|
| 3A | ø4 (diameter 4 mm) | 30 |
| 4B | ø6 (diameter 6 mm) | 65 |
| 5C | ø8 (diameter 8 mm) | 130 |
| 7D | ø10 (diameter 10 mm) | 200 |
SFE Series (single-action pipe fitting type) external appearance
| Symbol | Applicable tube outer diameter | Maximum flow capacity L/min (ANR) |
|---|---|---|
| 3F | ø4 (diameter 4 mm) | 30 |
| 4G | ø6 (diameter 6 mm) | 65 |
| 5H | ø8 (diameter 8 mm) | 130 |
| 7J | ø10 (diameter 10 mm) | 200 |
SFE-BR Series (bracket model) external appearance
| Symbol | Applicable models |
|---|---|
| 3 | SFE3□ |
| 4 | SFE4□ |
| 5 | SFE5□ |
| 7 | SFE7□ |
Specifications
| Model | SFE11 | SFE3□ | SFE4□ | SFE5□ | SFE7□ | |
|---|---|---|---|---|---|---|
| Fluid*1 | Air | |||||
| Maximum flow capacity*2 | Up to 3 L/min (ANR) | Up to 30 L/min (ANR) | Up to 65 L/min (ANR) | Up to 130 L/min (ANR) | Up to 200 L/min (ANR) | |
| Filtration*3 | 0.01 μm (filtration efficiency 99.99%) | |||||
| Noise reduction*3 | 30 dB (A) | |||||
| Operating temperature | 5 to 45°C | |||||
| Differential pressure proof (maximum operating pressure)*4 | 0.1 MPa | |||||
| Material*5 | Main body | PBT, polyolefin, polyurethane, PP*, stainless steel*, EPDM (fluorine coated)* | ||||
| Gasket | NBR, stainless steel | - | ||||
| Weight | Male thread | 1 g | - | 7 g | 12 g | 17 g |
| Plug-in | - | 3 g | 6 g | 11 g | 16 g | |
| Single-action fittings | - | 5.5 g | 8 g | 16 g | 24 g | |
| Bracket weight | - | 1.2 g | 2.5 g | 3.5 g | 5.5 g | |
| Compatible tubing material*6 (single-action pipe fitting type) | - | PFA, polyolefin, soft polyolefin, polyurethane | ||||
| Replacement period | · 2 years or when back pressure reaches 0.1 MPa · When the system fails to operate normally due to clogging | |||||
| Packaging | Antistatic sealed double package | |||||
*1: Do not use this product in air containing ozone, since it may break.
*2: Model should be selected based on flow capacity (see manufacturer's catalog).
*3: Measured under SMC's specified conditions.
*4: Pressure applied to SFE, and not supply pressure to the equipment that SFE is mounted on (e.g., solenoid valve, cylinder, etc.)
*5: The materials with an asterisk (*) are used for the single-action pipe fitting type only.
*6: Because polyurethane is a soft material, the tube may break when inserting. Hold the tube at its base and insert securely so that it reaches the back.
Dimensions
(Unit: mm)
SFE11 (top), SFE42/52/53/73 (bottom) dimensional drawings
| Model | A | B | C | D |
|---|---|---|---|---|
| SFE42 | 10 | 62 | 16.5 | R 1/8 |
| SFE52 | 10 | 71 | 20.5 | R 1/8 |
| SFE53 | 17 | 75 | 20.5 | R 1/4 |
| SFE73 | 17 | 84 | 24 | R 1/4 |
SFE3A (top), SFE4B/5C/7D (bottom) dimensional drawings
| Model | A | B | C |
|---|---|---|---|
| SFE4B | 6 | 73 | 16.5 |
| SFE5C | 8 | 84 | 20.5 |
| SFE7D | 10 | 94 | 24 |
SFE3F (top), SFE4G/5H/7J (bottom) dimensional drawings
| Model | A | B | C |
|---|---|---|---|
| SFE4G | 6 | 68.5 | 16.5 |
| SFE5H | 8 | 79 | 20.5 |
| SFE7J | 10 | 89 | 24 |
Bracket Dimensional Drawing
(Unit: mm)
SFE-BR3 (top), SFE-BR4/5/7 dimensional drawing
| Model | A | B | C | D | E | F | G | H | J |
|---|---|---|---|---|---|---|---|---|---|
| SFE-BR4 | 30 | 16 | 7 | 4.5 | 7.5 | (24.5) | 17 | 15.5 | (19.5) |
| SFE-BR5 | 30 | 10 | 8.2 | 4.5 | 8.1 | (29) | 20 | 18 | (23) |
| SFE-BR7 | 34 | 14 | 7.35 | 4.5 | 9.8 | (35) | 24 | 20 | (27.3) |
*Values in parentheses are reference dimensions.
Precautions
- *See the manufacturer's catalog for information other than the above.
- *Pictures are of representative models.