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Vacuum Pad, Standard Small Type, VPMA, One-touch Fitting Type
A small vacuum pad that is optimally suited for use in semiconductor manufacturing facilities. *The CAD data for this Series is being revised. This data will be made available as soon as the modifications have been completed.
[Features]
· Different pad types are available. These include a general type that is suited for flat work (non-flimsy/thick type work), a deep type that is suited for spherical fruits (apples, etc.) and balls, and a small type that is suited for small work and use inside semiconductor manufacturing facilities.
· This fitting is offered in a wide range of pad sizes, pad materials, and holder shapes.
· Pad holders have been added for applications that require the use of non-copper based metals and measures against low-concentration ozone.
· No copper-based metals are used in the metal component materials. HNBR is utilized for the rubber sealing material.
(i)Caution
- Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.
Japanese Only
Part Number
Configured Part Number is shown.
A Small Vacuum Pad Ideal For Use In Semiconductor Manufacturing Facilities
Pad material
Nitrile rubber, silicone rubber, urethane rubber, fluorine rubber, conductive silicone rubber, conductive butadiene rubber (low-resistance type), conductive NBR (low-resistance type), Food Sanitation Law-compliant NBR, HNBR, EPDM
Pad size
: Ø0.7 (diameter 0.7 mm), Ø1 (diameter 1 mm), Ø1.5 (diameter 1.5 mm), Ø2 (diameter 2 mm), Ø3 (diameter 3 mm), Ø4 (diameter 4 mm), Ø6 (diameter 6 mm), Ø8 (diameter 8 mm), Ø10 (diameter 10 mm), Ø15 (diameter 15 mm), Ø20 (diameter 20 mm), Ø25 (diameter 25 mm), Ø30 (diameter 30 mm), Ø40 (diameter 40 mm), Ø50 (diameter 50 mm), Ø60 (diameter 60 mm), Ø80 (diameter 80 mm), Ø100 (diameter 100 mm), Ø150 (diameter 150 mm), Ø200 (diameter 200 mm)
- *Static electricity-diffusing rubber and conductive rubber (low-resistance type) and Food Sanitation Law-compliant NBR are Ø1 to 50 (diameter 1 to 50 mm).
Fixed Type
| Vacuum Outlet, Upper | Vacuum Outlet, Horizontal | Direct Attachment | ||||
| Type | Standard | Small | Standard | Small | Standard | Small |
| Symbol | VPA | VPMA | VPB | VPMB | VPE | VPME |
Spring Type
| Vacuum Outlet, Upper | Vacuum Outlet, Horizontal | Direct Attachment | |||
| Type | Standard | Small | Standard | Small | Standard |
| Symbol | VPC | VPMC | VPD | VPMD | VPF |
Coupling size
| Single-action Coupling (mm) | Ø1.8, Ø3, Ø4, Ø6 |
|---|---|
| Barbed Coupling (Applicable Tube Outer Diameter × Inner Diameter) (mm) | Ø1.8 × Ø1, Ø3 × Ø2, Ø4 × Ø2.5, Ø6 × Ø4 |
Screw size
Flat female screws for pipes: Rp (G) 1/8, Rp s(G) 1/4
Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.
Small pads can be used with semiconductor parts
Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space.
Also compatible with the optional fall prevention valve and directly attachable-type pad filters.
The pad can be changed without detaching the holder from the equipment.
Pad holders compatible with applications requiring no copper-based metal use and low concentration ozone measures are available.
No copper-based metals are used in the metal component materials, and HNBR is used for the rubber sealing material.
- *Pad material: Nitrile, conductive rubber (low resistance type) and Food Sanitation Law-compliant NBR are not suitable for low-concentration ozone measures.
| Part Number | Standard Unit Price | Minimum order quantity | Volume Discount | Days to Ship | RoHS | Pad Shape | Mounting Method | Rubber Group Material | Environment | Color | Outer Diameter d (φ) | Height L1 (mm) | Full length B (mm) | Mount Connection Screw | Vacuum Outlet Tube Outer Diameter (φ) |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 0.7 | 4 | 20.5 | M5 | 3 | ||
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 0.7 | 4 | 19.9 | M5 | 1.8 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 0.7 | 4 | 20.5 | M5 | 3 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 0.7 | 4 | 19.9 | M5 | 1.8 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 0.7 | 4 | 20.5 | M5 | 3 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 0.7 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 0.7 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 0.7 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 0.7 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 0.7 | 4 | 19.9 | M5 | 1.8 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 0.7 | 4 | 20.5 | M5 | 3 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 0.7 | 4 | 19.9 | M5 | 1.8 | ||
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1 | 4 | 20.5 | M5 | 3 | ||
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1 | 4 | 19.9 | M5 | 1.8 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 1 | 4 | 20.5 | M5 | 3 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 1 | 4 | 19.9 | M5 | 1.8 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 1 | 4 | 20.5 | M5 | 3 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 1 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 1 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 1 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 1 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 1 | 4 | 19.9 | M5 | 1.8 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 1 | 4 | 20.5 | M5 | 3 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 1 | 4 | 19.9 | M5 | 1.8 | ||
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1.5 | 4 | 20.5 | M5 | 3 | ||
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1.5 | 4 | 19.9 | M5 | 1.8 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 1.5 | 4 | 20.5 | M5 | 3 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 1.5 | 4 | 19.9 | M5 | 1.8 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 1.5 | 4 | 20.5 | M5 | 3 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 1.5 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 1.5 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 1.5 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 1.5 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 1.5 | 4 | 19.9 | M5 | 1.8 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 1.5 | 4 | 20.5 | M5 | 3 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 1.5 | 4 | 19.9 | M5 | 1.8 | ||
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 2 | 4 | 20.5 | M5 | 3 | ||
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | 10 | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 2 | 4 | 19.9 | M5 | 1.8 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 2 | 4 | 20.5 | M5 | 3 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 2 | 4 | 19.9 | M5 | 1.8 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 2 | 4 | 20.5 | M5 | 3 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 2 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 2 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 2 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 2 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 2 | 4 | 19.9 | M5 | 1.8 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 2 | 4 | 20.5 | M5 | 3 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 2 | 4 | 19.9 | M5 | 1.8 | ||
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 3 | 4 | 20.5 | M5 | 3 | ||
SGD 22.31 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 3 | 4 | 19.9 | M5 | 1.8 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 3 | 4 | 20.5 | M5 | 3 | ||
SGD 14.67 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | NBR which conforms to Food Sanitation Law | Standard | Gray | 3 | 4 | 19.9 | M5 | 1.8 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 3 | 4 | 20.5 | M5 | 3 | ||
SGD 13.87 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Nitrile Rubber] Nitrile Rubber | Standard | Black | 3 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 3 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber | Standard | [White] White | 3 | 4 | 19.9 | M5 | 1.8 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 3 | 4 | 20.5 | M5 | 3 | ||
SGD 15.36 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | [Silicon Rubber] Silicone Rubber +Carbon | Standard / Static electricity diffusion | Black | 3 | 4 | 19.9 | M5 | 1.8 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 3 | 4 | 20.5 | M5 | 3 | ||
SGD 18.34 | 1 Piece(s) | 9 Day(s) or more | - | Small | Recessed Type | Urethane Rubber | Standard | Blue | 3 | 4 | 19.9 | M5 | 1.8 |
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Basic Information
| Pad Type | Standard / Holder Set | Material | Rubber-based | Mounting Fitting | Fixed Type |
|---|---|---|---|---|---|
| Vacuum Outlet Direction | Top | Fall Prevention Valve | None | Direct Attached Filter | None |
| Metal parts material | Standard Specifications |
Specification/Dimensions
-
Pad Shape
- Deep Type
- Small
-
Mounting Method
- Recessed Type
- Pad Screw Fixed
-
Rubber Group Material
- Nitrile Rubber
- NBR which conforms to Food Sanitation Law
- Silicon Rubber
- Urethane Rubber
- Fluorine Rubber
- Nitrile Rubber
-
Environment
- Standard
- Static electricity diffusion
-
Color
- Black
- Gray
- White
- Blue
-
Outer Diameter d(φ)
-
Height L1(mm)
-
Full length B(mm)
-
Mount Connection Screw
- M5
- M6
- M8
- M10
-
Vacuum Outlet Tube Outer Diameter(φ)
- 1.8
- 3
- 4
-
type
- VPMA
-
CAD
- 2D
- 3D
Days to Ship
-
- All
- 4 Day(s) or Less
- 9 Day(s) or Less
- 12 Day(s) or Less
Specify Alterations
- The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .
Tech Support
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